Joel Garcia: Behavioural modelling of a wafer transport unit using mCRL2


Event Details


As a master’s student I’m doing an internship with the assignement to design a model for an ASML wafer transport unit. The objective is to model the behaviour of two stages of the wafer transport unit: the wafer hanlder and the wafer stage. The model of such a machine is built by using the mCRL2 language. In this presentation, I will explain the progress of the work I have so far.